Conflat Seals for Custom Vacuum Chambers

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Conflat Seals for Custom Vacuum Chambers

Custom vacuum chambers used in ultra-high vacuum applications often vary from the more common cylindrical geometries of off-the- shelf chamber designs. The complex geometries of these custom chamber designs require not only the manufacturing knowledge to meet welding challenges but also the proper machine tools and experienced machinists to machine critical seal features, like Conflat knife-edge details, in unusual custom configurations. Since 1969 Meyer Tool has been manufacturing cutting edge custom vacuum chambers, components, and assemblies for one-off and low volume production applications. Our team of engineering and manufacturing professionals utilize our Reduce Project Risk Process to evaluate and determine the best methods to build your custom vacuum chambers and components.

Milling a large rectangular knife-edge detail. This custom vacuum chamber requires a custom rectangular knife-edge seal. A custom gasket and cover are also required

Conflat (CF) knife edge flanges are the most common type of dismountable flange used in ultra-high vacuum, even in custom vacuum chambers. Commonly called CF flanges, the design was originally patented by Varian, Inc. in the early 1960’s. Very quickly, CF flanges become an industry standard due to the design’s reliability and repeatability. Off the shelf CF flanges are now a commodity item manufactured by a large number of vacuum component suppliers; generally manufactured to the ASTM E2734 Standard Specification for Dimensions of Knife-Edge Flanges. CF flanges are used in vacuum systems in ranges down to 10-13 torr. Detailed information on “How a Conflat Knife-Edge Seal Works” is available in the link.

Standard CF seal applications utilize a circular geometry; however, the profile of the knife edge is not dependent on diameter or a circular configuration and the limitation to circular seals is one based on the ability to machine the detail in a non-circular configuration.

CNC Milling of knife-edge details requires an understanding of the seal geometries to ensure the proper interface between the chamber, cover and soft metal gasket. Special attention to the final surface finish of the knife-edge details is critical. The soft metal gasket itself, often of copper or aluminum, is also custom designed.

Circular geometries for knife-edge seals are preferred, especially if they can be matched to standard sizes, as they allow the use of standard blank flanges and gaskets. In complex geometries it may be impossible or difficult to turn these details on a lathe. However, when possible, turning is much more efficient. With proper planning and experience even difficult offset geometries, as illustrated in this short video, can be turned.

Custom vacuum chambers, whether single chambers or batch or production quantities utilized in original equipment applications, are a Meyer Tool specialty. The complex and challenging geometries of these custom chambers are overcome by the experience and knowledge of our team of engineering and manufacturing professionals.

Determining how to integrate ultra-high vacuum knife-edge seals in the complex geometries of your custom vacuum chamber application is just one aspect of how we apply our Reduce Project Risk Process to meet your requirements.

Meyer Tool has more than 50 years of experience manufacturing cutting-edge custom vacuum chambers. Our experience spans a wide range of materials, processes, and project sizes. Whether you’re building a single prototype or need production manufacturing support for your custom vacuum chambers and components, Meyer Tool’s engineering and manufacturing team approaches each challenge using our Reduce Project Risk Process to support your needs.
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